Digital Gas Sensor Platform

Micronas’ multi-parametric sensor platform GAS 86xyB includes two CCFET (Capacitive-Coupled Field-Effect Transistor) gas detection devices, a temperature sensor, and a relative humidity sensor. Each sensor can be independently addressed via a digital serial peripheral interface (SPI). Temperature and relative humidity sensors are factory-calibrated and can be used for compensation of gas sensor signals but also as measurement devices.
The gas sensor is based on a conventional MOSFET (Metal Oxide Semiconductor Field-Effect Transistor) with its floating gate connected to an electrode capacitively coupled to a gas-sensitive layer on a suspended gate. Any gas-induced change of the sensitive layer’s surface potential induces a modulation of the readout transistor that is detected by the integrated electronics.
The interaction between sensitive layer and ambient gas molecules is a reversible dynamic process taking place at room temperature, allowing unheated low-power operation for many gas species.

GAS 86xyB is the optimal system solution for:

• Detection of concentration changes of ambient trace gases
• Upgrading temperature and relative humidity based applications with gas detection

*Built-in self-test capability comprises the complete measurement signal path. The self‑test does not require the presence of a target gas.